Redundant via insertion in directed self-assembly lithography

Woohyun Chung, Seongbo Shim, Youngsoo Shin. Redundant via insertion in directed self-assembly lithography. In Luca Fanucci, Jürgen Teich, editors, 2016 Design, Automation & Test in Europe Conference & Exhibition, DATE 2016, Dresden, Germany, March 14-18, 2016. pages 55-60, IEEE, 2016. [doi]

@inproceedings{ChungSS16,
  title = {Redundant via insertion in directed self-assembly lithography},
  author = {Woohyun Chung and Seongbo Shim and Youngsoo Shin},
  year = {2016},
  url = {http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=7459280},
  researchr = {https://researchr.org/publication/ChungSS16},
  cites = {0},
  citedby = {0},
  pages = {55-60},
  booktitle = {2016 Design, Automation & Test in Europe Conference & Exhibition, DATE 2016, Dresden, Germany, March 14-18, 2016},
  editor = {Luca Fanucci and Jürgen Teich},
  publisher = {IEEE},
  isbn = {978-3-9815-3707-9},
}