A compact CMOS MEMS microphone with 66dB SNR

Jelena Citakovic, Per F. Hovesten, Gino Rocca, Aart van Halteren, Pirmin Rombach, Lars J. Stenberg, Pietro Andreani, Erik Bruun. A compact CMOS MEMS microphone with 66dB SNR. In IEEE International Solid-State Circuits Conference, ISSCC 2009, Digest of Technical Papers, San Francisco, CA, USA, 8-12 February, 2009. pages 350-351, IEEE, 2009. [doi]

Authors

Jelena Citakovic

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Per F. Hovesten

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Gino Rocca

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Aart van Halteren

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Pirmin Rombach

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Lars J. Stenberg

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Pietro Andreani

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Erik Bruun

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