A compact CMOS MEMS microphone with 66dB SNR

Jelena Citakovic, Per F. Hovesten, Gino Rocca, Aart van Halteren, Pirmin Rombach, Lars J. Stenberg, Pietro Andreani, Erik Bruun. A compact CMOS MEMS microphone with 66dB SNR. In IEEE International Solid-State Circuits Conference, ISSCC 2009, Digest of Technical Papers, San Francisco, CA, USA, 8-12 February, 2009. pages 350-351, IEEE, 2009. [doi]

@inproceedings{CitakovicHRHRSAB09,
  title = {A compact CMOS MEMS microphone with 66dB SNR},
  author = {Jelena Citakovic and Per F. Hovesten and Gino Rocca and Aart van Halteren and Pirmin Rombach and Lars J. Stenberg and Pietro Andreani and Erik Bruun},
  year = {2009},
  doi = {10.1109/ISSCC.2009.4977452},
  url = {http://dx.doi.org/10.1109/ISSCC.2009.4977452},
  researchr = {https://researchr.org/publication/CitakovicHRHRSAB09},
  cites = {0},
  citedby = {0},
  pages = {350-351},
  booktitle = {IEEE International Solid-State Circuits Conference, ISSCC 2009, Digest of Technical Papers, San Francisco, CA, USA, 8-12 February, 2009},
  publisher = {IEEE},
  isbn = {978-1-4244-3458-9},
}