Jelena Citakovic, Per F. Hovesten, Gino Rocca, Aart van Halteren, Pirmin Rombach, Lars J. Stenberg, Pietro Andreani, Erik Bruun. A compact CMOS MEMS microphone with 66dB SNR. In IEEE International Solid-State Circuits Conference, ISSCC 2009, Digest of Technical Papers, San Francisco, CA, USA, 8-12 February, 2009. pages 350-351, IEEE, 2009. [doi]
Abstract is missing.