A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror - researchr publication authors

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Omer Cohen, Avshalom Shai, Yael Nemirovsky. A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror. In Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004. pages 471-474, IEEE, 2004. [doi]

This author has not been identified. Look up 'Omer Cohen' in GoogleThis author has not been identified. Look up 'Avshalom Shai' in GoogleThis author has not been identified. Look up 'Yael Nemirovsky' in Google

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