A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror

Omer Cohen, Avshalom Shai, Yael Nemirovsky. A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror. In Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004. pages 471-474, IEEE, 2004. [doi]

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