Omer Cohen, Avshalom Shai, Yael Nemirovsky. A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror. In Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004. pages 471-474, IEEE, 2004. [doi]
@inproceedings{CohenSN04,
title = {A novel design and fabrication method of a pyramidal shape chip for scanning micro mirror},
author = {Omer Cohen and Avshalom Shai and Yael Nemirovsky},
year = {2004},
doi = {10.1109/ICECS.2004.1399720},
url = {http://dx.doi.org/10.1109/ICECS.2004.1399720},
researchr = {https://researchr.org/publication/CohenSN04},
cites = {0},
citedby = {0},
pages = {471-474},
booktitle = {Proceedings of the 2004 11th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2004, Tel Aviv, Israel, December 13-15, 2004},
publisher = {IEEE},
isbn = {0-7803-8715-5},
}