Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Daniel C. Cole, Eytan Barouch, Edward W. Conrad, Michael Yeung. Using advanced simulation to aid microlithography development. Proceedings of the IEEE, 89(8):1194-1215, 2001. [doi]
Abstract is missing.