Bernard Courtois, Jean-Michel Karam, Salvador Mir, Marcelo Lubaszewski, Vladimir Székely, Márta Rencz, Klaus Hofmann, Manfred Glesner. Design and Test of MEMs. In 12th International Conference on VLSI Design (VLSI Design 1999), 10-13 January 1999, Goa, India. pages 270, IEEE Computer Society, 1999.
Abstract is missing.