Improved deep trench isolation breakdown voltage for SmartMOS

Thuy Dao, Todd Roggenbauer, Gordon Boyd. Improved deep trench isolation breakdown voltage for SmartMOS. In Proceedings of 2013 International Conference on IC Design & Technology, ICICDT 2013, Pavia, Italy, May 29-31, 2013. pages 101-104, IEEE, 2013. [doi]

Abstract

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