Integrated CNTs thin film for MEMS mechanical sensors - researchr publication authors

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Van Thanh Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama. Integrated CNTs thin film for MEMS mechanical sensors. Microelectronics Journal, 41(12):860-864, 2010. [doi]

This author has not been identified. Look up 'Van Thanh Dau' in GoogleThis author has not been identified. Look up 'Takeo Yamada' in GoogleThis author has not been identified. Look up 'Dzung Viet Dao' in GoogleThis author has not been identified. Look up 'Bui Thanh Tung' in GoogleThis author has not been identified. Look up 'Kenji Hata' in GoogleThis author has not been identified. Look up 'Susumu Sugiyama' in Google

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