Integrated CNTs thin film for MEMS mechanical sensors

Van Thanh Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama. Integrated CNTs thin film for MEMS mechanical sensors. Microelectronics Journal, 41(12):860-864, 2010. [doi]

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