Van Thanh Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama. Integrated CNTs thin film for MEMS mechanical sensors. Microelectronics Journal, 41(12):860-864, 2010. [doi]
@article{DauYDTHS10,
title = {Integrated CNTs thin film for MEMS mechanical sensors},
author = {Van Thanh Dau and Takeo Yamada and Dzung Viet Dao and Bui Thanh Tung and Kenji Hata and Susumu Sugiyama},
year = {2010},
doi = {10.1016/j.mejo.2010.07.012},
url = {http://dx.doi.org/10.1016/j.mejo.2010.07.012},
researchr = {https://researchr.org/publication/DauYDTHS10},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {41},
number = {12},
pages = {860-864},
}