Effect of the silicon membrane flatness defect on the piezoresistive pressure sensor response - researchr publication authors

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Zohir Dibi, Ali Boukabache, Patrick Pons. Effect of the silicon membrane flatness defect on the piezoresistive pressure sensor response. In Proceedings of the 2000 7th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2000, Jounieh, Lebanon, December 17-20, 2000. pages 853-856, IEEE, 2000. [doi]

This author has not been identified. Look up 'Zohir Dibi' in GoogleThis author has not been identified. Look up 'Ali Boukabache' in GoogleThis author has not been identified. Look up 'Patrick Pons' in Google

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