Thermal parameters identification of micrometric layers of microelectronic devices by thermoreflectance microscopy

Stefan Dilhaire, Stéphane Grauby, Wilfrid Claeys, Jean-Christophe Batsale. Thermal parameters identification of micrometric layers of microelectronic devices by thermoreflectance microscopy. Microelectronics Journal, 35(10):811-816, 2004. [doi]

Abstract

Abstract is missing.