Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography - researchr publication authors

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Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak. Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography. In Proceedings of the 52nd Annual Design Automation Conference, San Francisco, CA, USA, June 7-11, 2015. pages 69, ACM, 2015. [doi]

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