Yixiao Ding, Chris C. N. Chu, Wai-Kei Mak. Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography. In Proceedings of the 52nd Annual Design Automation Conference, San Francisco, CA, USA, June 7-11, 2015. pages 69, ACM, 2015. [doi]
Abstract is missing.