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Robust MIMO control of a parallel kinematics nano-positioner for high resolution high bandwidth tracking and repetitive tasks

Jingyan Dong, Srinivasa M. Salapaka, Placid M. Ferreira. Robust MIMO control of a parallel kinematics nano-positioner for high resolution high bandwidth tracking and repetitive tasks. In 46th IEEE Conference on Decision and Control, CDC 2007, New Orleans, LA, USA, December 12-14, 2007. pages 4495-4500, IEEE, 2007. [doi]

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Jingyan Dong

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Srinivasa M. Salapaka

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Placid M. Ferreira

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