Robust MIMO control of a parallel kinematics nano-positioner for high resolution high bandwidth tracking and repetitive tasks

Jingyan Dong, Srinivasa M. Salapaka, Placid M. Ferreira. Robust MIMO control of a parallel kinematics nano-positioner for high resolution high bandwidth tracking and repetitive tasks. In 46th IEEE Conference on Decision and Control, CDC 2007, New Orleans, LA, USA, December 12-14, 2007. pages 4495-4500, IEEE, 2007. [doi]

Abstract

Abstract is missing.