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Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography

Chong Du, Weihai Chen, Yunjie Wu, Wenjie Chen, Mei Yuan. Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012, Guangzhou, China, December 11-14, 2012. pages 999-1004, IEEE, 2012. [doi]

Authors

Chong Du

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Weihai Chen

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Yunjie Wu

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Wenjie Chen

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Mei Yuan

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