External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography

Chong Du, Weihai Chen, Yunjie Wu, Wenjie Chen, Mei Yuan. Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012, Guangzhou, China, December 11-14, 2012. pages 999-1004, IEEE, 2012. [doi]

Possibly Related Publications

The following publications are possibly variants of this publication:

runs on