Thermal and electrostatic reliability characterization in RF MEMS switches

Q.-H. Duong, L. Buchaillot, D. Collard, P. Schmitt, X. Lafontan, P. Pons, F. Flourens, F. Pressecq. Thermal and electrostatic reliability characterization in RF MEMS switches. Microelectronics Reliability, 45(9-11):1790-1793, 2005. [doi]

Abstract

Abstract is missing.