Optimization problems for plasma-induced damage - A concept for plasma-induced damage design

Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, Kouichi Ono. Optimization problems for plasma-induced damage - A concept for plasma-induced damage design. In IEEE International Conference on IC Design & Technology, ICICDT 2012, Austin, TX, USA, May 30 - June 1, 2012. pages 1-4, IEEE, 2012. [doi]

Authors

Koji Eriguchi

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Yoshinori Nakakubo

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Asahiko Matsuda

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Masayuki Kamei

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Yoshinori Takao

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Kouichi Ono

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