Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, Kouichi Ono. Optimization problems for plasma-induced damage - A concept for plasma-induced damage design. In IEEE International Conference on IC Design & Technology, ICICDT 2012, Austin, TX, USA, May 30 - June 1, 2012. pages 1-4, IEEE, 2012. [doi]
@inproceedings{EriguchiNMKTO12,
title = {Optimization problems for plasma-induced damage - A concept for plasma-induced damage design},
author = {Koji Eriguchi and Yoshinori Nakakubo and Asahiko Matsuda and Masayuki Kamei and Yoshinori Takao and Kouichi Ono},
year = {2012},
doi = {10.1109/ICICDT.2012.6232840},
url = {http://dx.doi.org/10.1109/ICICDT.2012.6232840},
researchr = {https://researchr.org/publication/EriguchiNMKTO12},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {IEEE International Conference on IC Design & Technology, ICICDT 2012, Austin, TX, USA, May 30 - June 1, 2012},
publisher = {IEEE},
isbn = {978-1-4673-0146-6},
}