Application of various optical techniques for ESD defect localization

F. Essely, F. Darracq, V. Pouget, M. Remmach, Felix Beaudoin, N. Guitard, M. Bafleur, Philippe Perdu, A. Touboul, D. Lewis. Application of various optical techniques for ESD defect localization. Microelectronics Reliability, 46(9-11):1563-1568, 2006. [doi]

Abstract

Abstract is missing.