A Novel Layout Decomposition Algorithm for Triple Patterning Lithography

Shao-Yun Fang, Yao-Wen Chang, Wei-Yu Chen. A Novel Layout Decomposition Algorithm for Triple Patterning Lithography. IEEE Trans. on CAD of Integrated Circuits and Systems, 33(3):397-408, 2014. [doi]

Authors

Shao-Yun Fang

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Yao-Wen Chang

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Wei-Yu Chen

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