BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure

Y. Fang, Alicja Lesniewska, Ivan Ciofi, Philippe Roussel, Chen Wu, Victor Vega-Gonzalez, Ingrid De Wolf, Kris Croes. BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 1-7, IEEE, 2024. [doi]

Abstract

Abstract is missing.