Tunable MEMS capacitors considering deformation factor - researchr publication authors

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Dong-Ming Fang, Hai-Xia Zhang, Xiao-Lin Zhao. Tunable MEMS capacitors considering deformation factor. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 25-28, IEEE, 2009. [doi]

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