Dong-Ming Fang, Hai-Xia Zhang, Xiao-Lin Zhao. Tunable MEMS capacitors considering deformation factor. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 25-28, IEEE, 2009. [doi]
Abstract is missing.