Dong-Ming Fang, Hai-Xia Zhang, Xiao-Lin Zhao. Tunable MEMS capacitors considering deformation factor. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 25-28, IEEE, 2009. [doi]
@inproceedings{FangZZ09,
title = {Tunable MEMS capacitors considering deformation factor},
author = {Dong-Ming Fang and Hai-Xia Zhang and Xiao-Lin Zhao},
year = {2009},
doi = {10.1109/NEMS.2009.5068519},
url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068519},
researchr = {https://researchr.org/publication/FangZZ09},
cites = {0},
citedby = {0},
pages = {25-28},
booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4629-2},
}