The Least-Squares Approach to Systematic Error Identification and Calibration in Semiconductor Multisite Testing

Praise O. Farayola, Isaac Bruce, Shravan K. Chaganti, Abalhassan Sheikh, Srivaths Ravi 0001, Degang Chen. The Least-Squares Approach to Systematic Error Identification and Calibration in Semiconductor Multisite Testing. In 40th IEEE VLSI Test Symposium, VTS 2022, San Diego, CA, USA, April 25-27, 2022. pages 1-7, IEEE, 2022. [doi]

Abstract

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