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Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films

R. A. Farrell, K. Cherkaoui, N. Petkov, H. Amenitsch, J. D. Holmes, P. K. Hurley, M. A. Morris. Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films. Microelectronics Reliability, 47(4-5):759-763, 2007. [doi]

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