R. A. Farrell, K. Cherkaoui, N. Petkov, H. Amenitsch, J. D. Holmes, P. K. Hurley, M. A. Morris. Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films. Microelectronics Reliability, 47(4-5):759-763, 2007. [doi]
@article{FarrellCPAHHM07,
title = {Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films},
author = {R. A. Farrell and K. Cherkaoui and N. Petkov and H. Amenitsch and J. D. Holmes and P. K. Hurley and M. A. Morris},
year = {2007},
doi = {10.1016/j.microrel.2007.01.020},
url = {http://dx.doi.org/10.1016/j.microrel.2007.01.020},
researchr = {https://researchr.org/publication/FarrellCPAHHM07},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {47},
number = {4-5},
pages = {759-763},
}