R. A. Farrell, K. Cherkaoui, N. Petkov, H. Amenitsch, J. D. Holmes, P. K. Hurley, M. A. Morris. Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films. Microelectronics Reliability, 47(4-5):759-763, 2007. [doi]
Abstract is missing.