FDSOI bottom MOSFETs stability versus top transistor thermal budget featuring 3D monolithic integration

Claire Fenouillet-Beranger, Bernard Previtali, Perrine Batude, F. Nemouchi, Mikaƫl Casse, X. Garros, L. Tosti, N. Rambal, Dominique Lafond, H. Dansas, L. Pasini, L. Brunet, F. Deprat, M. Gregoire, M. Mellier, Maud Vinet. FDSOI bottom MOSFETs stability versus top transistor thermal budget featuring 3D monolithic integration. In 44th European Solid State Device Research Conference, ESSDERC 2014, Venice Lido, Italy, September 22-26, 2014. pages 110-113, IEEE, 2014. [doi]

Abstract

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