Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology

Gautam Gaddemane, Krishna K. Bhuwalka, Philippe Matagne, Gerhard Rzepa, Maarten L. Van De Put, Sybren Santermans, Oskar Baumgartner, Hao Wu, Geert Hellings. Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology. In 52nd IEEE European Solid-State Device Research Conference, ESSDERC 2022, Milan, Italy, September 19-22, 2022. pages 265-268, IEEE, 2022. [doi]

Abstract

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