Process dependence of BTI reliability in advanced HK MG stacks

X. Garros, M. Casse, M. Rafik, C. Fenouillet-Béranger, Gilles Reimbold, F. Martin, C. Wiemer, F. Boulanger. Process dependence of BTI reliability in advanced HK MG stacks. Microelectronics Reliability, 49(9-11):982-988, 2009. [doi]

Authors

X. Garros

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M. Casse

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M. Rafik

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C. Fenouillet-Béranger

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Gilles Reimbold

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F. Martin

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C. Wiemer

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F. Boulanger

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