When Wafer Failure Pattern Classification Meets Few-shot Learning and Self-Supervised Learning

Hao Geng, Fan Yang, Xuan Zeng 0001, Bei Yu 0001. When Wafer Failure Pattern Classification Meets Few-shot Learning and Self-Supervised Learning. In IEEE/ACM International Conference On Computer Aided Design, ICCAD 2021, Munich, Germany, November 1-4, 2021. pages 1-8, IEEE, 2021. [doi]

Abstract

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