Characterization of the thermal conductivity of insulating thin films by scanning thermal microscopy

Séverine Gomès, Pascal Newby, Bruno Canut, Konstantinos Termentzidis, Olivier Marty, Luc Frechette, Patrice Chantrenne, Vincent Aimez, Jean-Marie Bluet, Vladimir Lysenko. Characterization of the thermal conductivity of insulating thin films by scanning thermal microscopy. Microelectronics Journal, 44(11):1029-1034, 2013. [doi]

Abstract

Abstract is missing.