Study on the electrical breakdown failure mode transition of TSV-RDL

Tao Gong, Si Chen, Kai Li, Guoyuan Li, Zhizhe Wang, Xiaofeng Yang, Xiaodong Jian, Zhiwei Fu. Study on the electrical breakdown failure mode transition of TSV-RDL. Microelectronics Journal, 141:105982, November 2023. [doi]

Abstract

Abstract is missing.