Three-dimensional integrated circuits and stacked CMOS image sensors using direct bonding of SOI layers

Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto. Three-dimensional integrated circuits and stacked CMOS image sensors using direct bonding of SOI layers. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

@inproceedings{GotoHIOSKHTH15,
  title = {Three-dimensional integrated circuits and stacked CMOS image sensors using direct bonding of SOI layers},
  author = {Masahide Goto and Kei Hagiwara and Yoshinori Iguchi and Hiroshi Ohtake and Takuya Saraya and Masaharu Kobayashi and Eiji Higurashi and Hiroshi Toshiyoshi and Toshiro Hiramoto},
  year = {2015},
  doi = {10.1109/3DIC.2015.7334562},
  url = {http://dx.doi.org/10.1109/3DIC.2015.7334562},
  researchr = {https://researchr.org/publication/GotoHIOSKHTH15},
  cites = {0},
  citedby = {0},
  booktitle = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015},
  publisher = {IEEE},
  isbn = {978-1-4673-9385-0},
}