Wafer Topography-Aware Optical Proximity Correction

Puneet Gupta, Andrew B. Kahng, Chul-Hong Park, Kambiz Samadi, Xu Xu. Wafer Topography-Aware Optical Proximity Correction. IEEE Trans. on CAD of Integrated Circuits and Systems, 25(12):2747-2756, 2006. [doi]

Abstract

Abstract is missing.