Fengtian Han, Zhenbin Fu, Jingxin Dong. Design and simulation of an active electrostatic bearing for MEMS micromotors. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 80-85, IEEE, 2009. [doi]
@inproceedings{HanFD09,
title = {Design and simulation of an active electrostatic bearing for MEMS micromotors},
author = {Fengtian Han and Zhenbin Fu and Jingxin Dong},
year = {2009},
doi = {10.1109/NEMS.2009.5068531},
url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068531},
tags = {design},
researchr = {https://researchr.org/publication/HanFD09},
cites = {0},
citedby = {0},
pages = {80-85},
booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4629-2},
}