Fengtian Han, Zhenbin Fu, Jingxin Dong. Design and simulation of an active electrostatic bearing for MEMS micromotors. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 80-85, IEEE, 2009. [doi]
Abstract is missing.