Design and simulation of an active electrostatic bearing for MEMS micromotors

Fengtian Han, Zhenbin Fu, Jingxin Dong. Design and simulation of an active electrostatic bearing for MEMS micromotors. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 80-85, IEEE, 2009. [doi]

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