Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films

Alexander Hofer, Roland Biberger, Günther Benstetter, Björn Wilke, Holger Göbel. Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films. Microelectronics Reliability, 53(9-11):1430-1433, 2013. [doi]

Abstract

Abstract is missing.