Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Steven J. Holmes, Peter H. Mitchell, Mark C. Hakey. Manufacturing with DUV lithography. IBM Journal of Research and Development, 41(1&2):7-20, 1997. [doi]
Abstract is missing.