High-Rate Oblique Deposition of SiO::2:: Films Using Two Sputtering Sources

Yoichi Hoshi, Kensuke Yagi, Eisuke Suzuki, Hao Lei, Akira Sakai. High-Rate Oblique Deposition of SiO::2:: Films Using Two Sputtering Sources. IEICE Transactions, 91-C(10):1644-1648, 2008. [doi]

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