Xuanyu Huang, Rui Zhang, Yu Huang, Peiyao Wang, Mei Li. Enhancements of Model and Method in Lithography Hotspot Identification. In Design, Automation & Test in Europe Conference & Exhibition, DATE 2021, Grenoble, France, February 1-5, 2021. pages 102-107, IEEE, 2021. [doi]
@inproceedings{HuangZHWL21,
title = {Enhancements of Model and Method in Lithography Hotspot Identification},
author = {Xuanyu Huang and Rui Zhang and Yu Huang and Peiyao Wang and Mei Li},
year = {2021},
doi = {10.23919/DATE51398.2021.9473963},
url = {https://doi.org/10.23919/DATE51398.2021.9473963},
researchr = {https://researchr.org/publication/HuangZHWL21},
cites = {0},
citedby = {0},
pages = {102-107},
booktitle = {Design, Automation & Test in Europe Conference & Exhibition, DATE 2021, Grenoble, France, February 1-5, 2021},
publisher = {IEEE},
isbn = {978-3-9819263-5-4},
}