Enhancements of Model and Method in Lithography Hotspot Identification

Xuanyu Huang, Rui Zhang, Yu Huang, Peiyao Wang, Mei Li. Enhancements of Model and Method in Lithography Hotspot Identification. In Design, Automation & Test in Europe Conference & Exhibition, DATE 2021, Grenoble, France, February 1-5, 2021. pages 102-107, IEEE, 2021. [doi]

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